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4) Short time anneals are very useful for limiting diffusion. What method is used to heat...

4) Short time anneals are very useful for limiting diffusion. What method is used to heat the wafer very rapidly (100 oC/sec or more)?

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Rapid thermal annealing method is used at low temperatures to avoid diffusion .

At high temperature diffusion may occur so to avoid that RTA method is used. This method the material is rapidly cools down,thus diffusion will not occurs.

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