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5.1 Boron is implanted with an energy of 60 keV through a 0.25-um layer of silicon dioxide. The implanted dose is 1 X 10*/cm2. (O) Fiad the boron coohion-silicon ioxide interftace (b) (c) Find the dose in silicon. Determine the junction depth if the background concentration is 3 x 1015/cm3.

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Its sandad os 0 ㄑㄧㄒㄒ 띠ou c (x) is ueny 2 0.2 032) 2 x.ostx osy

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