Question

Vacuum Technology problem - Consider a diffusion pumped vacuum svstem shown on the next page. The 30 cm diameter cylindrical chamber is constructed of stainless steel, and is 30 cm high. a) Determine the net pumping speed for the chamber assuming a 150 I/s diffusion pump connected through a trap and baffle with a conductance of 200 1/s. b) c) Determine the ultimate pressure of the chamber assuming a surface area of 8000 cm2 What should the value of the pumping speed of the mechanical ("backing") pump for the diffusion pump be, assuming a maxiumum pressure of 0.07 mbar can be tolerated? d) What diameter for the foreline should you use for this system, if the foreline pressure must remain below 0.25 mbar? A high vacuum pumping systemm ON GAUGE CHAMBER TC2 VENT VALVE ROUGHING VALVE GATE VALVE TC TRA BAF FLE FLEXIBLE COUPLING (RUBBER HOSE) COOLING WATER DIFFUSION PUMP SOLENOID VALVE (N.O.) SOLENOID VALVE (N.C.) CK-COOL WATER FORELINE VALVE MECHANICAL PUMP FORELINE TRAP SECTION ㅇF FOR E LINE BOLTED TO WALL TO ISOLATE MECHANICAL-PUMP VIBRATION

Answer 1

Griven D30 m わー 30 cm 20