Question

QUESTION 6

1. What is the downside of a using a plasma in semiconductor processing?

   	1.	Plasmas can damage wafers by high energy incident particles or photons.
   	2.	This is a trick question - there is no downside from using a plasma.
   	3.	Plasmas lower the proessing temperature required to drive a chemical reaction. This dampens demand for high temperature furnaces.
   	4.	Clean room workers have a tendency to stare at "pretty" plasmas instead of doing their work which hurts productivity.
   	5.	Plasmas are difficult to model since so many reactions are happening within the plasma and between the plasma and the substrates.

Answer 1