Question

.Consider the design of an aluminum electrostatic actuator with a moveable plate of 100 μm x 100 μm suspended by four beams (90 urn long, 5 μm wide, 1 μm 5 um thick) as shown. There is a bottom electrode and a top electrode which has same area as the moveable plate and they are coated with a very thin insulator which can be negligible in theoretical calculations. The initial gap between the moveable plate and the bottom and the top electrode is 3 μm when there is no voltage applied. Assume that aluminum's Young's modulus is 70 GPa and the fringing field is negligible. Also assume that air damping is negligible. Find the pull-in voltage (Vp) of this actuator 90 um d +x

Answer 1

LOM y obuum en dtd techic Coritanto 1시hese let. Sd 1.6. 6

2 Doo 16 And 4かし And 上

X (D tD 6 Therafde, pull in voltoqe 02DAt 6 121 Pf