What is the smallest possible feature size that can be resolved by using a 193-nm optical...
What is the smallest possible feature size that can be resolved by using a 193-nm optical source and the highest possible NA that can be obtained by a lens when exposing the image in air? Note that NA can be determined by the equation
NA = n∙sin(θ)
where n is the index of refraction of the medium in which the lens is working (air in this instance) and θ is the maximal half-angle of the cone of light that can enter or exit the lens and has a maximum possible value of 90˚ for a very large lens.
Homework Answers
The smallest possible feature size, that is the critical dimension (CD) can calculate by the following expression.
Step 2
Write the expression for the numerical aperture (NA) of the lens.
Calculate the angle (θ) for the maximum numerical aperture (NAmax) as below,
Thus, the maximum numerical aperture (NAmax) is,
The lithography k1 coefficient is 0.5 at 193 nm optical source.
Thus, the smallest possible feature size, that is the critical dimension (CD) is,
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What is the smallest possible feature size that can be resolved
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Question 5:
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(1 point) READING 4 The resolution of a microscope is diffraction limited, just as the eye, but gains a significant advantage because an object can be placed very close to its objective lens. The smallest resolvable linear separation xTor an ordinary light microscope is: where λ is he wavelength o light used, and Θ ls he half Viewing angle 0 he obiective The quantity n sne s ca e the num enca aperture of he obiective where n s the...
Write your answers as A, B, C, D, E, F, G, etc. on the answer page. Any answers NOT recorded on the answer page will NOT be counted. 1. The diagram shows a wave moving in the direction of the arrow. What type of wave is it? A) longitudinal B) pressure C) transverse D) None of these. yzing the light from a distant star, an astronomer determines that normal 4.5733104 Hz light has a frequency of 4.7243104 Hz in the...
Part I: Background When a ray of light strikes a smooth surface, it can either reflect, such as with a mirror, or it can both reflect and refract, such as with glass. In this make-up lab activity, we shall look at both situations. This make-up lab shall try to replicate the lab from your lab manual as best possible. Be sure to read the "Discussion" in your regular lab manual. You will be using the Bending Light simulation. Part II:...
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How would dust and oil on the glass plates affect the
results?
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