Question

Question 1 A plasma etcher has a yield of good chips that is influenced by pressure (Xi) and gas flow rate (X2). Both Xi and X2 are scaled variables (OXi 2). A model has been developed base on operating data as follows: Y =-0.1X1 + 0.2X2X2-0.09X2-0.11x? + 0.15% + 0.5 Use ExcelTM Solver to maximise yield (Y), using starting points (1,1) and (0,0)

Answer 1

It's solved using solved in excel. Maximum value of Y is 0.65025 when X1= 1.204159 & X2= 2

Solver Parameters SEST Set Objective: To: O Max By Changing Variable Cells: SF$7:$G$27 X1 X2 0.65025i 1.204159 Subject to the Constraints: 0.1 0.1 0.2 0.51319 Add 0.2 0.3 0.52344 0.3 GS72 0.53159 Change 0.4 0.5 0.53824 0.4 0.54375 0.54824 0.5 Delete 0.6 0.7 0.6 0.7 0.8 0.55159 Reset All 0.55344 0.55319 0.8 0.9 0.9 Load/Save 0.55 1 Make Unconstrained Variables Non-Negative 1.1 1.1 1.2 0.54279 Select a Solving GRG Nonlinear Options 1.2 1.3 0.53024 1.3 0.51079 1.4 1.5 1.6 0.48264 Solving Method 1.5 1.6 0.44375 Select the GRG Nonlinear engine for Solver Problems that are smooth nonlinear. Select the LP Simplex engine for linear Solver Problems, and select the Evolutionary engine for Solver problems that are 0.39184 0.32439 1.7 1.7 1.8 1.9 0.23864 1.8 1.9 0.13159 Solve 5e 1.20066E+11 2 1155026