Another MEMS device, used for the same purpose as the one in Problem 17.49, has a differen...
Another MEMS device, used for the same purpose as the one in Problem 17.49, has a different design. This electrothermal actuator consists of a thin V-shaped silicon beam, as shown in the figure. The beam is not attached to the substrate under the device but is free to move, whereas the electrical contacts (marked + and ‒ in the figure) are attached to the substrate and cannot move. The beam spans a gap between the electrical contacts that is 1800 µm wide, and the two halves of the beam slant up from horizontal by 0.10 rad. Electrical current flows through the beam, causing it to heat up. When current is made to flow across the beam, the beam reaches a temperature of 500. °C. Assume that the temperature is constant along the entire length of the beam (strictly speaking, this is not the case). How much and in which direction will the tip move? The linear expansion coefficient for silicon is 3.2 ∙10‒6 °C-1 .
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